纳光电集成与先进装备教育部工程研究中心
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多功能磁控溅射装置

Multi-functional magnetron sputtering system


For the preparation of a variety of metals, metal oxides, diamond-like  carbon films, and thin films for solar cells

扫描电子显微镜

Scanning Electron Microscope

 

Function / Applications: secondary electron images,  backscattered electron images; micro-area composition analysis with EDS

薄膜测厚仪

Surface Profiler


For the measurement of the thin film thickness

等离子增强化学气相沉积

Plasma enhanced chemical vapor deposition system


For the preparation of a variety of metals, metal oxides and  diamond-like carbon films and carbon nanotubes.

低压热化学气相沉积

Low-pressure thermal chemical vapor deposition system

 

For the preparation of carbon-based composites, including carbon  nanotubes, carbon nanotubes and carbon fiber composite membrane.

电化学工作站

Solar cell test system


For the I-V test of solar cell

高真空场发射测试系统

High vacuum field emission testing system  


For the test of IV characteristics of field emission display modules

LED分选测试系统

LED sorting test system  


For the sorting of LED

FED封装炉

FED packaging furnace  


For the vacuum packaging of FED modules